Research On High Vacuum And Ultra High Temperature Of NC Zone Furnace

With the material technology becoming one of the three pillars of the new technological revolution in the world,the material equipment has also been included in the science development plan.The characteristics of the existing melting furnace and crystal growth furnace were analyzed in this article.A new material equipment was designed,and was named High vacuum and Ultra high temperature of NC Zone Furnace.The High vacuum and Ultra high temperature of NC Zone Furnace is a kind of special melting equipment with high performance.In the condition of high vacuum and ultra high temperature,many metal and semiconductor will be preparated new material samples by directional solidification,crystal growth and zone melting.This new zone furnace merges many characteristics,includes zone melting equipment of high vacuum and ultra high temperature,and the device of NC and ultra precision motion.The differences of the new and traditional equipment are as follows:(1)Setting the directional solidification,crystal growth and zone melting in a boby,making a furnace with multiple.(2)Because the experimental samples are prepared in high vacuum and ultra high temperature,so the scope of the preparation of the new materials can be expanded.(3)Using the numerical control to control low speed,precision displacement and rotation of the crucible(driven by the seed crystal rod),the quality of the preparation of new materials can be improved.The High vacuum and Ultra high temperature of NC Zone Furnace was studied in three aspects,including the system of high vacuum,the system of heating,the system of mechanical(crucible motion device).And the analysis and structure design were carried on.(1)The achievement of high vacuum.In the zone furnace,the material sample is performed in high vacuum.Therefore,the achievement of high vacuum is the key.The vacuum degree of 10-4 Pa was realized by using the two vacuum unit.(2)Two kinds of heating methods:high frequency induction heating and electric resistance heating.According to the different material samples,different heating methods were chose to realize the different requirements of 2500? and 1200?.(3)The crucible's low speed and precision displacement of 0.1 mm?3.0mm/h were realized by using the device of NC and ultra precision.(4)The fast speed of 10-100mm/min was realized by designing a slow-fast speed variator when the speed variation was big(>6000).(5)The orientation and rotation of crucible were controlled by using the control panel—PLC—AC servo motor.(6)The High vacuum and Ultra high temperature of NC Zone Furnace was designed and developed,and the experiment was carried on.The result showed that the operation of the equipment was stable and the material was qualified.