Research On The Key Technology Of Laser Flatness Meter

In this paper,based on the problem that the coordinate system of on line measurement of gears is difficult to be accurately established,a method of using laser plane as the reference plane has been proposed.Based on the research of the technology of laser plane formation and the flatness detection technology of laser plane,the technical support for the precision measurement of large or super large gears has been provided in this paper.In this paper,a scheme of generating laser fan-shaped plane has been presented.In this scheme,PSD sensor as the position detection device,was used to flatness measurement of laser plane,which provided a high-precision and high-stability datum plane for measuring coordinate system and the measured gear coordinate system.The project has mainly completed in the following aspects:First,the test platform of laser plane measurement system was set up.Second,the signal data acquisition system based on single chip microcomputer was designed to realize the real-time measurement of spot displacement.Third,spot position sensor PSD was calibrated.Fourth,laser plane was detected and its precision was analyzed.Through a lot of testing,the calibration of the central region of PSD-900?900?m has the best linearity,the linearity is 0.26%,and the minimum resolution is up to 2?m;through the analysis of the influence of the laser focus position on the measurement accuracy,it is verified that the more the line width is,the less the energy is,and the larger the measurement error is,the lower the measurement accuracy is;through the stability test of the system,the fluctuation deviation of fixed point measurement is within 0.5?m,and the system stability is good;repeatability of measurement accuracy is better than 3.8?m.Under the condition of high-precision test,it is concluded that the fan-shaped laser surface is wavy forward along the ray direction.Therefore,it is necessary to establish a laser plane with high-power,high-precision,high-stability of the laser transmitter,and generate a laser surface with thinner thickness and uniform light plane;the detection of laser plane needs a high-linearity and high-resolution position detector.At the same time,the influence of stray light and other factors should be avoided.