Research On Key Technology Of Multi-stage Claw Type Lubrication Vacuum Pump

Research and Development of dry vacuum pump originated in semiconductor microelectronics industry,mature and medical,machinery,coal equipment,industrial dust removal derusting industries,countries in vacuum pump research and development,production invested a lot of money,manpower,although has made great progress,but the whole vacuum industry is still in the abroad study stage,this topic research the multistage claw type vacuum pump based on the greening of national energy strategy,on the basis of to fill our province multistage claw type vacuum pump lubrication free zero gap,injected fresh blood to the industrial transformation in our province.In this paper,starting from the basic working principle of single claw type vacuum pump on the principle of multistage claw type vacuum pump is analyzed,according to the analysis of the principle of multistage vacuum pumps were proposed in the paper the whole structure design,design of key parts,from the aspects of pump cavity,the shaft system,motor design,and compression ratio,extreme pressure,pumping speed of vacuum pump performance aspects of the theoretical calculation,for subsequent further provide the theoretical basis for the design of the rotor.The shape of the claw rotor is important for the performance of the claw vacuum pump.This paper presents an analysis model of the profile of a claw rotor,including the contour equation,design method and geometric theory.The tooth form meshing relation is established.In order to reveal the unique transition characteristics of the claw vacuum pump,a model diagram based on rotation Angle is established to describe the whole working process of the claw vacuum pump.Transition process is studied in detail in compressed gas,gas expansion and mix,a new cavity generation,the respect such as detailed working characteristic,analyzed the claw type vacuum pump leak problem existing in the work process,determines the optimum size reasonable leakage clearance between rotor and,through the axisof the rotor radius ratio,paw arc Angle and affect the working performance of the relationship between the capacity utilization factor analysis,to determine the size of the optimum design of the rotor,preliminary discussed the multistage dynamic balance of vacuum pump,the labyrinth seal technology applied to claw type pump seal problem for the first time.By using the method of CFD in the provided professional fluid simulation software CFX claw type vacuum pump suction,exhaust the entire working process,finite element numerical simulation analysis of transient fluid,analyze the whole process of pressure changes in the pump cavity and thermodynamic process.The research results have some reference value for the selection of the new type claw rotor model and the design performance evaluation of the vacuum pump.