Research On Concept Design Of MEMS Product Based On SysML

In recent years,due to the limitation of traditional mechanical and electrical products,it has been unable to meet the needs of many work situations.The research and development of Micro Electro-Mechanical System(MEMS)has solved this problem well.The micro electromechanical system is different from the traditional mechanical system,MEMS has scale effect and multi discipline characteristics,micro manufacturing process and cross scale effects and other features,so the design process of MEMS products are more complex than the traditional design process of mechanical and electrical products,and because of the rapid development of the market,innovative design of MEMS products is particularly important.The research in the conceptual design phase will improve the innovative design of the product.This paper combines the characteristics of the MEMS products to improve the conceptual design model based on MEMS,uses the model based system engineering theory and Sys ML to realize the conceptual design of MEMS products,then uses the secondary development theory of ANSYS and model driven development theory to realize the development and validation of Micro electro mechanical product conceptual design platform.The main contents of this paper are as follows:First of all,this paper combined with the scale effect of MEMS,multidisciplinary characteristics,micro manufacturing process and cross scale compatibility characteristics and design method based on knowledge,then proposes an improved MEMS V model and Function-Effect-Structure-Characteristics(FES-C)model.Improved V model of product design consider the characteristics of micro electromechanical system in the whole design cycle of the products,and the use of knowledge based design method will improve the design efficiency of MEMS products.Secondly,based on the improved V model and conceptual design process model,the concept design framework of MEMS products is implemented by Sys ML modeling language.SysML diagram is adopted to support all stages of MEMS product design and realize the MEMS product conceptual design library.The conceptual design library includes function library,effect library,structure library,material library,process library and so on.By using this method,the design and modeling of examples is carried out.This article has took the micro vibration energy collector as an example and has realized therequirements analysis,module design and parameter analysis process.Thirdly,combined with the conceptual design method of MEMS product to realize the demand analysis of the conceptual design platform of MEMS products.This part analyzes the overall demand of the platform through the demand and the use case diagram,and then analyzes the functional requirements of each module and the software design process of each module of conceptual design platform.Finally,the design of the MEMS product conceptual design platform is realized with the requirement analysis.The model driven theory is used to generate the code based on the SysML diagram,and the class files of each component are obtained.Then write the APDL macro file of the component and invoke it on the conceptual design platform to implement the secondary development of the ANSYS.The design of each module of the conceptual design platform is realized,including the login module,the solution design module,the concept design library module,the design and performance simulation module and the performance simulation result module.Last,this platform has been verified by the design of micro vibration energy collector.