Numerical Analysis And Experimental Study On Electroforming Forming Of Precision Spray

Uniform horn containing large import and export,high aperture deep hole shaped spray film micropore array structure,because of its advantages of high efficiency,uniform droplet size and long service life,is the core element of high performance end atomization device,but with the characteristics of the spray film preparation is challenging.From the numerical simulation the angle of effect of mask thickness,spot center spacing and diameter of micropore profile,in theory to explore the forming mechanism of spray sheet microporous;and in the process of stainless steel using lithography to produce mask thickness spots are very thin,and using the method of electroforming in the final molding,stainless steel substrate deposited on the surface of pore diameter in the spray film 4.8?m,thickness 24?m.The main part of the preparation of precision spray piece involved using this processing method is implemented according to the spot mask lithography mask making,parameter spot largely determines the morphology of the spray sheet microporous processing(such as film thickness,spray aperture size,horn profile etc.).In this paper,in order to achieve a large liquid inlet,liquid outlet,high effective thickness of one-way horn shaped spray film micropore array as the goal,relying on lithography and micro electroforming technology platform,from two aspects of numerical simulation and experimental study explores the spray profile parameters with microporous film mask on the spot spray horn shaped microporous sheet a profile of the influence,and the performance of spray tablets were evaluated.The main research contents are as follows:(1)In this paper,a simulation model based on mask mask is established.On the basis of the model,the influence of the thickness,diameter and the center distance of the mask mask on the profile of the spray is analyzed.The simulation results show that the thickness of spray keeps unchanged,by reducing the insulation spot diameter,can obtain smaller micropore film spray liquid outlet diameter;in keeping the spray liquid outlet plate diameter and pore density is fixed,by adjusting the thickness of the mask pattern,can get the spray tablets of different thickness.(2)The effects of electroforming time,mask profile and mask center spacing on microporous profile were studied.The feasibility of this technique was verified by photolithography and electroforming.The experimental results show that the thickness of the sprayed film has a great effect on the shrinkage of the diameter of the microporous outlet,and the larger the thickness is,the slower the shrinkage velocity of the micropores is.The profile of the hole has little effect;the simulation results in the mouth into the mouth will appear in varying degrees of uplift,but the experimental results in the pores into the mouth of the mouth almost no uplift.(3)The distribution of atomized particle size of sprayed films under different pore diameters was studied experimentally.The results show that when the diameter of the micropore is 12?m,the amount of atomization is larger,and the particle size distribution of the droplet is more concentrated,but the particle size is larger,the cumulative volume distribution curve is steep and the diameter is between 11?m ~ 23?m The accumulated volume accounts for 80%;the micropore diameter is 4.8 m,the amount of atomization is small,and the cumulative volume distribution curve of droplet diameter rises slowly,but the droplet diameter is smaller.