Basic Research On V₂O₅/Diamond Films In Multiband Laser Blinding Protection

With the rapid development of laser weapons,the multiband laser blinding protection of infrared photoelectric equipment is more urgent in the field of photoelectric countermeasures.The V₂O₅/diamond film system,which combines the excellent properties of diamond substrate,the thermo-induced phase transition characteristics of V₂O₅ films and the spectral filtering characteristics of interference cut-off filter film system,is a new type of laser blinding protective film structure.V₂O₅/diamond film system has the characteristics of multiband,high damage threshold,high optical density,low protection threshold and fast switching response in the field of laser blinding protection.In order to obtain a new multiband laser blinding protection technology,the design,preparation and performance analysis of V₂O₅/diamond multiband laser blinding protective films were carried out in this thesis.The main work and achievements of this thesis include:（1）The unit cell modeling and optical property calculation of V₂O₅ were carried out by using the First Principle.The theoretical refractive index,extinction coefficient and reflectivity of V₂O₅ were obtained.TFCalc software was used to design and optimize the multiband laser blinding protective films applied for 3-5μm and 8-12μm.（2）V₂O₅ thin films were prepared on diamond substrates by magnetron sputtering and annealed.The effects of sputtering power,substrate temperature and oxygen-argon ratio on surface roughness and crystallinity of V₂O₅ thin films were studied.Besides,the effects of annealing atmosphere,annealing time and annealing temperature on surface roughness and transmittance of V₂O₅ thin films during annealing treatment were studied.Finally,the preparation and annealing parameters of V₂O₅thin films were obtained.The polycrystalline V₂O₅ thin films with obvious preferred orientation in（h00）direction were prepared by optimizing the process.The surface roughness of the films was less than 5 nm,and the transmission performance was good.（3）ZnS and YbF₃ thin films were prepared on sapphire substrates by magnetron sputtering and annealed.The effects of substrate temperature,annealing temperature and annealing time on surface roughness of ZnS and YbF₃ thin films were studied.The preparation and annealing parameters of the corresponding films were obtained.The polycrystalline mixed phase ZnS films and amorphous YbF₃films with high transmittance and low surface roughness were acquired.（4）The films containing V₂O₅,ZnS and YbF₃ thin films were prepared on diamond substrates.The design model was validated by the prepared films.The results show that the surface roughness of the film system increases with the increase of the number of layers,the overall evenness is good,and the thickness of each layer is close to the theoretical value.Moreover,it has good laser limiting performance in 3-5μm and 8-12μm wave bands and good phase change switch performance.