Research On Nanomanipulation By Spm Probe Combined With Laser Near-field Enhancement Optical Tweezers Based On SEM

With the micro-electro-mechanical system(MEMS)develop in the direction of smaller scale and better performance,the key role of nano-manipulation technology in the processing,assembly and performance characterization of devices has gradually emerged.Nano manipulation methods are diverse,including direct contact with Scanning Probe Microscope(SPM)and non-contact operation with optical tweezers.In recent years,due to high precision and low influence characteristics,near-field optical tweezers gradually attracted more attention.Scanning Electron Microscope(SEM)is a commonly used means of microscopic observation,In comparison with Atom Force Microscope(AFM),it gradually occupies a dominant position due to its high efficiency in real-time imaging.In this paper,the combination of near-field optical tweezers and SEM provides a new way of nanomanipulation.This paper analysis the basic theory of near-field optical tweezers,and build the models of electromagnetic field analysis and force analysis.The Finite Difference Time Domain(FDTD)method is used to simulate and calculate the electromagnetic field distribution caused by laser,and various kinds of nano forces involved in the operation process should be analyzed.Optimize the operation methods through parameter adjustment and comparison,and simulate the operation process of near-field optical tweezers.Simulation analysis is used to guide the experimental research and verify the feasibility of the basic theory.On the basis of these theories,in order to achieve more accurate and efficient nanometer operation,a new strategy of laser composite probe nanometer operation is proposed,comparing the advantages of its operation mode with the previous near-field optical tweezers,which opens up new ideas and technologies for future research.Design a set of multi-dof nanometer operating robot system based on SEM.The system has the capability of high resolution real-time imaging and operation.It integrates several high-precision end-effectors of nano-robot.Introduces optical fiber laser to form near-field optical tweezers.Design the composition,structure and components of the system.It can meet the requirement of SEM-based laser composite probe nanometer operation.Carry out the fiber probe composite with AFM probe nano manipulation based on SEM experiment.The AFM probe was used to directly push the nanoparticles,and the fiber probe was used to operate the carbon nanotubes.The near-field optical tweezers were used to control the bending and deformation of carbon nanotubes,and the advantages of this operation mode should be compared.Make these experiments verify the correctness of the numerical simulation and have a guiding effect on the subsequent experiments.