Study On Surface Modification Of ZnO:Al Films And Its Application In Solar Cells

Based on the suede light trapping theory of the solar cell transparent conductive layer,the effect on the surface morphology of the ZnO:Al thin films which derived from the various of preparation parameters and etching process had been studied.As the suede light trapping layer,the influence of the ZnO:Al thin films with different surface morphology on the amorphous silicon solar battery had been studied also.The main results as following:(1)An equipment combined with the magnetron sputtering and PECVD were selected to prepared the ZnO:Al thin films and the composite coating on the amorphous silicon solar cell which formed with the P,I and N chamber.(2)The influence of preparation parameters,etching process and the heat treatment process on the surface morphology of the ZnOAl thin films had been studied.The controllable surface morphology of the ZnO:Al thin films had been prepared and the optimized technology parameters had been obtained.The relationship between the performance of the ZnO:Al thin films and the preparation technology had been revealed by the Experimental results also.(3)The effect of the various ZnO:Al thin films which derived from different treatment processes on the amorphous silicon cells had been investigated.In this article,the amorphous silicon solar cell were combined with the P type SiC layer,intrinsic amorphous silicon layer and N type mc-Si layer.According to the princple of the light trapping suede,the ZnOAl thin film with various surface morphology were deposited on the surface of the amorphous silicon solar cell.The experimental results indicated that the Zno:Al thin film which etched by HCl and phosphoric acid and following the annealing process with the best performance,and the photoelectric conversion efficiency can increased from 3.81%to 8.39%.