Research On Interferometry Of Axial Parameters Of Optical System

With the wide application of high-precision optical instruments such as lithography machines,high-precision microscopes,and satellite cameras,the requirements for the imaging quality of optical systems have become more stringent.As the most important factor that affects the quality of the imaging system,the axial parameters of the optical system need to be accurately measured and strictly controlled in the actual processing and assembly process.However,there are relatively few researches on the axial parameter detection technology of optical systems in China,and the accuracy is not high.Therefore,based on optical interference technology,this paper proposes a non-contact high-precision long-range optical system axial parameter measurement method.Low-coherence technology is used to accurately locate the vertices of each surface of the lens in the optical system to be measured.The interference signal generated by high-coherence is used as a measurement scale.The same large-length optical delay line is used to achieve accurate measurement of the axial parameters of large-scale optical systems..The research work in this paper mainly includes: completing the design of a large number of optical delay line modules according to the overall scheme,establishing a mathematical model of the optical path delay of the rotary optical delay line,and performing parameter calculation and mechanical structure design of the internal optical components.Design and calculate parameters such as the equal fiber group to increase the scanning range of the measurement system.The design of the centering module was completed,and the structural form and parameters of the centering objective lens were analyzed and calculated according to the centering scheme.The centering objective lens was optically simulated using the ZEMAX software,and the structure of the centering lens was completed by selecting the lens fixing form and material.design.Finally,an experimental platform is set up,and largerange optical delay line modules,high-and low-coherence measurement systems are assembled and debugged in turn.The experimental system is used to verify the accuracy and measurement range of the measurement system,and analyze possible error sources in the system.The experimental results show that the measurement accuracy of this system can reach 1?m in the 200 mm measurement range.It provides a good basis for the highprecision measurement of the axial parameters of the optical system during processing and assembly.