SS-DNA decorated single-walled carbon nanotube based sensors integrated onto CMOS circuitry

The proliferation of processing and metrology equipment coupled with the intense interest in nanotechnology has resulted in the discovery of numerous novel nanoscale materials and continued with the demonstrations of device and sensor applications. Nanomaterials (of dimensions 1-100nm) exhibit novel physical, chemical and biological properties not available in the bulk form. Some of the widely investigated nanoscale materials include carbon nanotubes, nanoparticles, nanowires, nanobelts, and quantum dots. The field of nanotechnology, is not only fertile for scientific discoveries, but also has significant potential for novel practical applications. Furthermore, several issues remain; one is the further need for System level approaches to nanotechnology.;The objective of this thesis is to design and implement functional Micro Systems with active nanomaterial components. The proposed work encompasses design, modeling and characterization of nanomaterials assembly (mediated by electric fields) on to microelectrodes. In addition to devices built with individual nanomaterials, an emerging approach is to build devices realized with randomly deposited networks. Accordingly, nanomaterials based networks on rigid and flexible substrates are being investigated. In addition, a carbon nanotube network is being implemented and characterized on a flexible parylene-C substrate. The final objective of this project is to realize a multi purpose system powered with nanomaterials, has nanosensors (ss-DNA decorated single-walled carbon nanotubes sensors) and is built on top of CMOS circuitry enabled with the processing and storage power of CMOS electronics.