Design And Fabrication Of Piezoelectric Rotary Actuator

In recent years,as a typical multidisciplinary field of application,micro-actuators arouse more and more scholars' extensive attention.Microactuators are widely used in communication,biomedicine,aerospace and environmental monitoring because of their small size,low cost,small inertia,fast response and low energy consumption.This paper designed a piezo-driven rotary actuator,and discuss the rotary actuator from aspects of piezoelectric actuator design,kinematics and dynamics model of transmission mechanism,flexible hinge design,microfabrication technology,test platform construction and experiment.First of all,a five-layer cantilever piezoelectric actuator with a composite structure is designed based on the inverse piezoelectric effect,and the mathematical modeling and structure optimization are carried out based on laminate theory.Secondly,the design of transmission mechanism was carried out,and the dimension parameters of transmission mechanism were determined and optimized through kinematics and dynamics analysis.According to the characteristic size of the transmission mechanism,the flexible hinge in the mechanism is designed and analyzed.Then,the micromachining technology of rotary motion actuator was explored,and the machining process was designed for the components such as the piezoelectric actuator,the transmission mechanism and the base mechanism.And the prototype assembly was finished.Finally,this paper built a laser displacement test platform,tested the performance of the piezoelectric actuator and completed the related test of the prototype.In this paper,we designed piezoelectric rotary actuator,and made a useful exploration and experiment on the design and processing of the actuator.It is beneficial to the design and manufacture of micro-actuators in the future.