Research On Vibration/Magnetic Field Integrated Sensor Design And Fabrication Technology

Battlefield sensor network,intelligent minefield,the author of this thesis,the system of detection and identification requirements such as to miniaturization,low power consumption,combined into a breakthrough point,the introduction of the MEMS technology,through the research of vibration/magnetic structure scheme and technology of the monolithic integrated sensor technology,monolithic integrated sensor model is established,and a detection method for battlefield target detection.In this dissertation,the structure and process flow of monolithic integrated sensor are analyzed,and the prediction model of monolithic integrated sensor is established.The main work is reflected in the following aspects:1.On the monolithic integrated sensors at home and abroad research achievements of research and summarized,and several typical vibration sensor and magnetic sensor and magnetic sensor type,based on the analysis of the typical structure,according to the design requirements,determine the structure of vibration sensor and magnetic sensor,and determine the overall scheme of the monolithic integrated sensors.2.Based on the basic structure and working principle of vibration sensor,theoretical analysis of the 0-50 g vibration stress of the sensor structure,natural frequency and damping effects on it,combining the theoretical analysis results to determine the structure size of vibration sensor,using ANSYS finite element simulation analysis was carried out on the vibration sensor structure,including static analysis and modal analysis of the structure,and according to the results of static analysis,determine the design parameters of pressure resistance element.3.Based on the basic structure and working principle of magnetic sensor,and theoretical analysis of the-0.6T-0.6T static characteristic of magnetic sensor,using Silvaco TCAD software for magnetic sensor structure modeling,analysis of the magnetic sensitive layer wide hole length ratio and output width influence on magnetic properties,determine the structure size of the magnetic sensor,and the series of hall element sensitivity compared with single hall element sensitivity analysis,validate the rationality of the structure of magnetic sensor.4.Combined with the standard technology of the processing unit,the structure processing layout design and processing process flow design of the monolithic integrated sensor are completed,and the key technologies involved are described.Based on the above work,the structure form and size parameters of the mono-chip integrated sensor are determined.Theoretically,the magnetic field and vibration signals can be distinguished.The theoretical sensitivity of the 0-50 g vibration sensor is 43.52 m V /g,and the theoretical sensitivity of the-0.6T-0.6T magnetic sensor is 158.82 m V /g.