Design And Implementation Of Automatic Test System For The MOEMS Scanning Mirror

Micro-Opto-Electro-Mechanical Systems(MOEMS)is a new and highly dynamic technological system developed in recent years from the field of Micro-electro-mechanicalsystems(MEMS).MOEMS is a controllable micro-optical system whose micro-optical elements can control the convergence,diffraction and reflection of light beams under the action of micro-electronic and micro-mechanical devices,which enables optical switching,attenuation,scanning and imaging functions to achieve excellent results.Due to its high capacity,high brightness,long life,small size,light weight and low power consumption,the use of optical MOEMS sensors for projection is one of the future trends in the development of projection display technology.With the large-scale application of MOEMS,a large number of devices with different performance indexes need to be tested in the process of R&D,production and inspection.Design and development of more reliable,accurate and economical automatic test systems to quickly and accurately test products for microelectronics R&D and production companies to improve product performance and quality is an urgent task to be completed.This thesis focuses on the design of MOEMS automatic test system for scanning mirror.The thesis first analyzes the application background of MOEMS automatic test system and the current situation of domestic and international research,then analyzes the overall design requirements of MOEMS test system,then introduces the main technical indexes of the system,and finally determines the scanning mirror performance test scheme based on the combination of automatic test software architecture of virtual instrumentation technology and standardized instrumentation testing technology,and introduces in detail the test system’s The hardware composition,overall process design and software function design of the test system were introduced in detail,and finally the main performance indexes of the MOEMS scanning mirror were tested.The design of MOEMS Automated Test System(ATS)mainly includes hardware design and software design.The hardware equipment of the test system consists of the host computer,power supply module,driver module,data acquisition module,measurement module,communication module and PSD(Photosensitive Station Detect)photoelectric detection module.The software part is composed of the upper computer software,which adopts Labview(Laboratory Virtual Instrument Engineering Workbench)software of National Instruments Corporation(NI)with better data analysis function.The upper computer software uses Labview(Laboratory Virtual Instrument Engineering Workbench)software of National Instruments Corporation(NI),which has good data analysis functions,to realize the functions of automatic data acquisition,analysis and processing of the collected data and data storage of the test system instrumentation.The main technologies include SCPI(Standard Commands for Programmable Instruments)commands and VISA(Virtual Instrument Software Architecture)function library to control each measurement instrument such as arbitrary waveform generator.The system is designed to provide the excitation signal for the device to be tested and the purpose of testing various indexes by acquiring test data in real time while the scanning mirror is in scanning state.And the modules of system self-test,user login and instrumentation status display are added into the system.At the end of the thesis,the resonant frequency,optical deviation angle and angular detection sensitivity of the MOEMS micromirror are measured,and the indicators meet the index requirements of the scanning mirror.The test system is more accurate and reliable than the way of using microcontroller and FPGA(Field Programmable Gate Array)to drive and acquire,which can meet the requirements of enterprises for the development of test system.