Research On Modeling,Measurement And Calibration Of Flexible Hinge Micro-Nano Motion Platform

The micro-nano operating platform refers to the robot with high accuracy and fast response performance at the nanoscale,which broadly applicated in many high-grade,precision and advanced fields such as precision manufacturing,biomedicine,aerospace,etc.The parallel micronano platform driven by deformable actuators and transmitted by flexible hinge is relatively mature,but there is lack of comprehensive research of the micro-nano operating platform.This paper takes the 3-RPR micro-nano operating platform as the research object.The input-output model with stiffness parameters and calibration model based on error analysis are proposed,and a high-precision pose measurement system is built.Based on the theoretical research and 3-RPR prototype,calibration and trajectory experiments are conducted.The main research contents of this paper are as follows:1)The kinematics model of the micro-nano operating platform is established.Besides,take the internal and terminal force of the chains into kinematics model,the input-output model considered the deformation of flexible hinges is studied.The constraints of the micro-nano platform are built,and the working space of the/prototype is drawn using the exhaustive method.2)To measure the pose of upper platform at high precision,a micronano pose measurement system based on the multiple dual-beam laser interferometers is established.The measurement model of spatial 6-degree-of-freedom pose is built and simplified solution of the end pose is given.Through the simulation and experiments,the error of the measurement system is studied,and the validity and precision of the measurement system are demonstrated.3)Based on the error source analysis with normalization of the end pose,the calibration model of 3-RPR platform is built.And the calibration method includes the optimization algorithm of pose points,parameter identification method and error compensation method is researched.The calibration simulation and experiment are completed,and parameter errors of the prototype are identified.4)An open/closed-loop trajectory control experiment system is established,various plane curve trajectory experiments of 3-RPR prototype are carried out,includes square,circle,spiral and sines curve.The trajectory control results demonstrate the 3-RPR prototype has a high accuracy at nanometer scales.