Design And Development Of Combined Probe Microscope Detection Syste

Scanning probe microscope(SPM)is the main tool for characterizing morphology in the nano age.It is a kind of nanometer precision instrument based on physics and combined with many advanced technologies.At present,mature commercial scanning probe microscopes have the problem of single function and difficult to switch functions.For example,if you use a scanning tunneling microscope to scan the distribution of electronic states of a sample and then you need to scan the actual atomic arrangement of the sample,you need to manually switch the sample to an atomic force microscope.This operation not only wastes time,but also may cause damage to the sample,which is not conducive to a full analysis of the sample.Therefore,it is of great significance to design a combination probe microscope which can realize free switching of scanning function.Based on the traditional STM and AFM,this paper proposes a new type of combinatorial probe microscope which combines the advantages of STM and AFM on the one hand,and makes up for their shortcomings on the other.The main work of this paper is as follows:(1)Design the overall system of the combined probe microscope,and divide the tasks into control system,detection system and mechanical structure design,and put forward technical requirements for the design of each part.Analyze the technical difficulties existing in the testing system and mechanical structure.(2)Design and test the circuit of the detection system of the combined probe microscope.It mainly includes public circuit part,STM circuit part and AFM circuit part.And the test of each part of the circuit,to ensure that it has less noise,higher stability and accuracy.(3)In order to test the performance of the detection system,a high-thrust stepper motor was designed and manufactured,which was suitable for the structure of the STM-AFM threestage modular microscope.The principle of the motor and the stepping signal were explained and the motor was tested.A combination microscopic head shared by STM and AFM was made to switch the scanning function.(4)The device connecting the detection system with the mechanical structure is designed,and the working performance of the detection system is tested under the whole system...