Design And Analysis Of A New Macro-Micro Mechanism For Adjustment

Whether in the field of microelectronics manufacturing,medical field,or biological engineering and other precision processing and manufacturing fields,the motion range,accuracy,speed and acceleration of the equipment are very important but difficult to guarantee at the same time,especially in the field of microelectronic packaging.In order to achieve high efficiency and high quality,in addition to the above requirements,it is necessary to solve the influence of high acceleration and frequent start-stop vibration on the positioning time and accuracy of the equipment.The use of appropriate mechanisms and driving methods is an important way to solve these contradictions and problems.Therefore,a new macro-micro adjustment mechanism of 3-PCPR is proposed in this paper,and a series of problems such as kinematics,optimization design and error analysis are studied in depth.Firstly,according to the requirements of large-scale high-speed precision positioning and position adjustment mechanism in semiconductor packaging and other fields,the design requirements and technical indicators are determined,and the problems to be solved in configuration design are summarized.A new mechanism is proposed by using the synthesis method of series-parallel motion equivalent mechanism.The series-parallel3-PCPR mechanism without intermediate platform based on 3-PCR and 3-CPR parallel mechanism is optimized,and the driving form of the mechanism is determined.Secondly,the kinematics of the 3-PCPR macro-micro adjustment mechanism is analyzed,and the position inverse solution,velocity and acceleration equations are established.By setting the end trajectory equation of the mechanism,the theoretical calculation results of the position inverse solution,velocity and acceleration of each branch are obtained,as well as the simulation results of the position inverse solution,velocity and acceleration of each branch.The theoretical calculation and simulation results are carried out to verify the correctness of the kinematics equation.Then,the workspace and dexterity of the 3-PCPR mechanism are analyzed.According to the actual working requirements of the macro-micro adjustment mechanism,the mechanism optimization objective function is established by maximizing the motion space of the mechanism and the dexterity mechanical performance index.The multiobjective particle swarm optimization algorithm is used to optimize the mechanical structure parameters of the mechanism,and the function changes before and after optimization are compared to verify the optimized mechanism performance.Finally,the optimized 3-PCPR macro-micro adjustment mechanism is taken as the research object,and the kinematic error model is constructed according to the motion constraint equation.The control variable method is used to analyze the influence of different error factors and the position of the moving platform on the accuracy,and the change of the end accuracy in each direction when the error parameters change.