Application Of MEMS Wind Speed ​​Sensitive Device In High Speed ​​Flying Body

The application of MEMS (Micro-Electro-Mechanical System) promotes the miniaturization and intelligentization of the fuze. A MEMS wind speed sensitive device, which was used in fuze safety system as trajectory speed measuring device, was promoted by combining the fuse system working environment for some projectiles with no obvious second environmental forces. The head-on air resistance was used as the velocity measuring environment force, Flying status was detected by the wind speed sensitive device through the relationship between resistance, velocity and displacement and signal was output to determine whether it is suitable to arming.According to the application background of the outside trajectory speed measuring device, the basic design requirements of the MEMS wind speed sensitive device are proposed, including miniaturization design requirements, velocity measurement range 60-240 m/s, anti-overload performance requirement (15000g), working temperature range-55℃o 70℃. 189.8～258.7 m/s was set as the velocity threshold of arming, according to the relationship between the velocity and the displacement of the rocket.MEMS wind speed sensitive device was composed of an air inlet, a pressure sensing diaphragm, force sensitive resistor, signal conditioning circuit and data processing system. The influence of different air inlet scheme and structure parameters on the flow field and pressure in the intake port was studied, and the optimum structure design parameters of each part were determined and the design of the MEMS was finished. The final threshold voltage was confirmed by comparing the output response of the wind speed sensitive device at different speeds, different temperatures and different altitudes.The process flow chart of the key part of the MEMS wind speed sensitive device is designed, and the prototype of the wind speed sensitive device is processed. The response performance of different wind speed and anti-high overload performance of the wind speed sensitive device was verified through the air compressor and static blowing tests Mushet impact test.