A Study On Test Technology Of Nano Scale Vibration In Tunneling State

The vibration has already become one of main obstacles for improving nano measuring precision. The technology of anti-vibration, vibration isolation, vibration compensation turns into a big branch in nano measuring field, especially the development of nano level vibration measuring technology is very important to nano science.Starting from the sensitivity to vibration of STM, the dissertation has a primary exploration and research on theory,techniques and measuring methods of nano level vibration based on tunneling effect, and analyses the influence of the vibration to STM. Using the nano level micro motion flatform as the adjusting device together with tunneling current sensor, we have carried out experiments of nano level vibration in tunneling state by applying the external vibration. Because the measuring vibration device based on tunneling effect has high sensitivity, good frequency characteristic and the same vibration response characteristic consistent with STM, it can supply the vibration compensation for STM and improve STM measuring precision.The main contents in the dissertation are as follows:Analyzing the sensitivity to vibration of STM, putting forward the design of nano level vibration measuring method based on tunneling effect.Studying the variety of tunneling current and designing a suited preamplifier system for the tunneling current.Building up vibration testing device and making it tests the nano level vibration.Testing experiments were carried out to observe the static, dynamic characteristics of the tunneling current sensor and the static characteristics is calibrated.A series of experiments have been carried out on the vibration-testing device, and the results indicate that the model is characterized with high sensitivity, good frequency response characteristics and has achieved favorable consistency with STM in frequency response.