Design Of Electrical Control System On A Magnetic Scattering Vacuum Three-target Film Coating Machine

The vacuum film coating machine is a kind of direct current magnetism access of reflecting the sputter and plating the membrane machine. The vacuum film coating machine mainly applies to the production process of a vacuum tub. According to technology requests and technical parameters, using the PLC and a touch screen as a platform of hardware development, the system of electrical control with three-target magnetic scattering vacuum film coating machine has been designed. Both workpiece rotation and target rotation adopt a modular riving circuit of dynamos that produces a direct current. Armature stepping down and starting can be achieved by PLC the software procedure. Instead of the oil diffusing pump, the molecule pump settles the oil returning phenomenon which occurs in the production of film coating, when oil diffusing pump is used. Molecule pump also can improve the quality of film coating, reduce the power consumption of the control system and economize on electrical energy to at least 90 percent. Speed close-circuit control of the molecule pump VVVF adaptive control is based on a vacuum degree in the vacuum room, which effectively soles the contradiction between the stability and the instability of the vacuum degree. The fuzzy control method of target electrical engineering power in accord with technological and technical parameters uses software procedure to simplify the hardware circuit. This method obviously far outweighs the traditional PHD control method. Melting in the treatment current and feeding back the return circuit can solve the contradiction between stability and instability in the direct current. The whole monitor is used to install parameters and manifest the process and the operation of opening and shutting, reflects the spirit taking man as main body and also enhances the reliability of the control system.The system of electrical control has the function of installing parameters, voluntarily or manually controlling the technological process of technology, and giving a warning and a protection when the system is out of order. In this article, a detailed demonstration analyzing and corresponding design to the structure of the control, system software and hardware have been discussed. In the design, PLC software procedure is analysed by exploiting emulation software offered by Mitsubishi Company. Then the control system is debugged wholly in the production scene. The feasibility of this system is verified by production practices.