Study On The Effect Form Parameters On MEMS Hall Device Properties

The Hall sensor is one of the most used magnetic sensors at present, the integration of Hall sensor and driving circuit is one important trend of the MEMS technique. Hall device material, shape, process and interface circuit and so on are factors that are closely relative to sensitivity. The paper makes sure the manners to increase the sensitivity of MEMS Hall device active part (Hall plate) through studying the effect of different kinds of parameters on Hall-effect. The relation of both rectangle and round Hall structural dimension and Hall device sensitivity is confirmed through the hall-effect simulation by ANSYS. Then comparing sensitivity of two kinds of Hall plate's shape, the optimization model that can achieve optimal sensitivity is gained.Rectangle Hall plate is one of the most used Hall plate design structures, the working state of rectangle Hall plate whose length, width and thickness are respectively 0.6mm, 0.4mm and 0.2mm is transiently simulated using ANSYS.By analyzing the curve of the relation between Hall voltage distribution nephogram and time, Model formation and all stimulation process of the Hall plate by ANSYS satisfied the requirement of the paper studying.Keeping the length and sickness of rectangle Hall plate invariable, Hall plate whose width range is from 0.30mm to 0.40mm is transiently simulated. When the width is 0.38mm, Hall voltage is maximizing, and then decrease as the width is 0.40mm. But the value of VH/Hz is maximizing at this time. Optimum width of Hall plate is 0.40mm and optimal aspect ration is 1.5.Keeping the optimal aspect ration invariable, different wide Hall plate is transiently simulated. The results show that the sensitivity is optimum, when the thickness is 0.02mm. The ratio of length to thickness is 30.Circular Hall plate is a typical representation of great symmetry Hall plate structures. The special structure makes its symmetry invariability under condition...