Development Of Thin-film Temperature Sensor

The paper is in the field of cutting temperature measurement,which is under the support of Natural Science Foundation of LiaoNing Province(No.20062143) and Plan for Scientific and Technological Industry in Colleges and Universities of LiaoNing Educarion Department. (No.05L023).Cutting temperature is of great importance on the mechanism of high speed cutting,which change quickly and hard to realize. Distribution and change law of high-speed cutting temperature is one of the important basis of process analysis. Cutting temperature of aluminum is worked over by thin-film thermocouples sensor.NiSi/NiCr thin-film thermocouples are successively developed on the tools by the research team in oeder to monitor the cutting temperature for the safety production. Dynamic measurement of cutting temperature of aluminum is mainly presented in this paper.The paper includes design and development of thin-film thermocouples sensor,the fabrication method for the thin-film thermocouples by the Magnetron Sputting,static calibration and dynamic calibration,the cutting temperature measurement experiment and finite element simulation. Dynamic calibration and finite element simulation of the thin-film temperature sensor is the main work.The right pulse as heat source induced by the adjustable power pulse laser,different from the conventional dynamic calibration method,which is vertically irradiated coating layer surface,aborbing the laser energy,to get the instantaneous high temperature accommodating to dynamic characteristic of the thin film thermocouple,and towards thin-film interior by heat conduction,and make the thermocouples produce temperature rise and voltage signal output. The experiment shows that dynamic response of thin-film thermocouples sensor is fast and the time constant is 0.5ms.Finite element analysis of temperature field in cutting are simulated by ansys in the end. The simulation results are extremely in agreement with those of experiments above.