Research And Development Of Semiconductor Production Computer Integrated Manufacturing Systems Based On SECS/GEM

Some IC manufacturers have given serious thought to automation in the back-end of semiconductor manufactruing but nevertheless, no successful technology has been developed that can meet the extremely varied needs of the backend factory. This thesis presented a CIMS solution of semiconductor back-end automation based on SECS/GEM. All equipments were hooked up with cell controller to a higher level MES and factory planning information system by SECS/GEM interface. Functions like Equipment monitoring, remote control, process data collection, recipe management, SDT, strip map management; lot tracking and reject management are achieved by the fully integrated line. By implementing CIMS automation solution, semiconductor manufacturers have more throughput capacity, shorten process cycle time and less space. The quality and reliability of manufacturing are improved by minimizing human intervention and keeping the equipment in-line.The main contents of this thesis are as follows:1. Introduced the structure, historical roadmap and development tendency of semiconductor CIM system, analyzed the problems of semiconductor manufacturing automation.2. Introduced the definition of SECS/GEM standard.3. Build a fully integrated semiconductor production line based on SECS/GEM interface. The line can make the equipment being integrated into CIM system rapidly, shorten equipment development time, and lower the cost, increasing the efficiency of equipment setup, faster throughput and more throughput capacity.4. Design the software and hardware of the fully integrated semiconductor production line. Design the SECS/GEM interface in detail.