Research Of Preparation About The Hole Pitch Less Than10nm Of Anodic Aluminum Oxide Template

This paper is mainly focus on how to make the particular AAO (anodic aluminum oxide)which the pore diameter within10nm. After studying the factors affecting the formation of aluminum oxide template (pole spacing of positive and negative electrode, electrolyte concentration, oxidation voltage, current density and temperature and time),some experiments were made based on the influence of geometric parameters of anodic aluminum oxide template. Although there is no template that the prepared hole-spacing is less than10nm, some results were obtained. The results show that the oxidation voltage has the largest impact on the template hole spacing. The hole spacing increases with the voltage linearly within a certain range, so to obtain AAO template pore diameter within10nm the voltage must be less than10v.In the study of the electrolyte types we found that sulfuric acid was intend to smallest hole spacing compared to other types of acid in the same condition. Therefore sulfuric acid was believed as the ideal electrolyte to get small hole-spacing template.This paper also explored the role of electric field on the anodic oxidation process. The finite element method was used to calculate the initial stage in the process of electrolysis aluminum membrane electric field distribution and stage of development. In this paper, four2-dimensional model is established to carry out finite element analysis, which are respectively the initial hole spacing range phase model and hole depth range model; Hole range development phase of the distance between cellular automata model and equal spacing of cellular automata model. The analysis of alumina at the beginning of the reaction and development stage in the development of electric was obtained under the action of computing the electric field distribution model. The results showed that the anodic aluminum oxide reaction, the initial hole-spacing and depth will affect the hole at the bottom of electric field distribution, and affects the further development of the hole. Holes in the stage of development, under the action of electric field, will adjust the spacing between each other. In the end, the hole will become more orderly. The experimental process and experiment device are made by ourselves, through the analysis of every step of the process that may be influence the geometric parameters of the template, setting technical process that can prepare less than10nm hole spacing successfully, and explaining the process of experiments carried more detailed. When the experiment is completed, It carried out that the voltage and electrolyte concentration can affect the current density in the process of change, then affect the geometrical structure of the template parameters. We also analyse some special templates that made by some experiments. In brief, the main factors that influence the structure size of template, one is the voltage and the other is sulfuric acid concentration. Finally, we mainly talk about some common faults of aluminum surface, and analyse the cause of fault to avoid such failures happen again.