MEMS Device Characteristics And Performance Testing Technology Research

In this paper, to grasp the micro-EDM technology development status at home andabroad, based on the micro-EDM technology to do a thorough research, the micro-EDMmachining principles expound discharge erosion process, in the same time, the complexdischarge process is analyzed, the discharge energy conversion is summarized, andstudying the surface quality after machining and electrical parameters of the relationship,and using the method of narrow pulse width discharge experiment the surface quality ofthe possible outcomes are classified research, for the reasons for the formation ofsurface pit and the size of the formation was studied, using ANSYS finite elementsimulation software for modeling and simulation, I simulate the temperature field in amachining process, by the image processing method I obtain the simulation results, andyou can see different times of the size of the temperature change and the final craterformation, using the formula of correction, get the change trend of pits, validate theinfluence rule of discharge parameters on the surface quality.In this paper, the characteristics of this technology for the process of doing athorough research, multi-objective optimization setting parameters, using the scientificmethod of orthogonal experiment, variation of various parameters on the process ofsummarizing, on the machining process it is investigated by drillingexperiments and has been processed efficiency and electrode wearing the optimizationparameters, the parameters for roughing and finishing optimization has a great role inguiding, in the processing of about0.1mm fine structure, used in the finishing of theparameter optimization settings, after two experiments it has been good test results, forthe processing of such fine structure provides a strong reference, and attempt to thedesign of flame-proof plate and the gear processing, depending on the material selectedcombinations of parameters. After many experiments, through the success of theprocessing it makes to meet design requirements padlock pieces, and sums up theprocess for the future processing of complex parts to provide a reference. For extremelyfine structures, In this paper, by comparing the number of micro-electrode productionline, the choice of the block electrode machining anti-copy method is used to prepare a diameter of0.1mm,0.08mm,0.05mm different electrodes, the processing of theelectrodes need using a punch and a narrow groove machining experiment, and producean electrode with a diameter of about0.012mm, the above aspect ratio at1:30. It laid afoundation for three-dimensional fine structure productions.