| ITO film having high conductivity and high visible light transmittance is used as a transparent conductive anode materials in many devices, such as flat panel displays, solar cells, organic light emitting device(OLED) and many other devices. However, ITO film directly deposited onto PET is difficult because of the PET surface chemistry inert. And it leads to device easy to aging and to reduce the service life of the device. Thereby increasing the adhesion of ITO film and PET materials has important significance.In this paper, low energy O ion beam was used to modify the surface of PET, and the tin indium oxide(ITO) films were deposited onto the polyethylene terephthalate (PET) surface that has been bombarded by an O ion beam. The working pressure and time of O ion beam have been systematically studied, which could effect on the PET chemical composition, the surface chemical bond structure, static water contact angle, and effect on the ITO/PET composition, the surface chemical bond structure, the surface morphology, the sheet resistance and the adhesion properties ITO/PET. The main results are listed as the followings:1. For O ion beam working pressure increased from0.1Pa to0.9Pa, with the other conditions constant, it was found that the O element relative content on PET surface increased constantly from28at.%to37at.%and the relative content ratio of C=O/C-O bond on PET surface also increased constantly from1.13:1to2.85:1. And with the increasing of the O element relative content, the polarity chemical bonds with O increased. At the same time, the static contact angle of PET surface to water was reduced from55°to7°, which meant that the PET surface becomes hydrophilous.2. For O ion beam working time increased from2min to30min, with the other conditions constant, O element relative content on PET surface increased constantly from29at.%to39at.%and the relative content ratio of C=O/C-O bond on PET surface also increased constantly from3. For O ion beam working time increased from2min to30min, with the other conditions constant, it was found that after bending fatigue experiment the cracks in ITO/PET surface get shortened frome the micrometre-scale cracks to the nanoscale cracks, which meant that ITO/PET surface topography become flat.4. After the bending fatigue tests in the same bending speed, the resistance change ratio of the sample by O ion bombardment is samll than the resistance change ratio of the sample without O ion bombardment.5. After the bending fatigue tests in the different bending speed, with the other conditions constant, it was found that the fast speed of the bending fatigue tests had greater influence on ITO/PET than the slow speed of the bending fatigue tests. |
PDF Full Text Request