Study Of Oleo Phobic And Hydro Phobic Function Of TiN Thin Films Prepared By Magnetron Sputtering

With the continuous improvement of people’s living standards improve and environmental awareness, the hydro phobic and oleo phobic materials with excellent water repellent and oil repellent are playing more and more important role in daily life and product manufacture and national defense. Such as application of the oleo phobic and hydro phobic film technology in textile and leather surface and make waterproof, anti oil clothing and leather shoes. Using hydro phobic and oleo phobic materials in surface of ship and submarines can not only reduce water resistance of ship and improve the navigation speed but also anti fouling and corrosion. And application of self-cleaning materials is more and more concerned with such demand.At present, for preparation of the basic principles of hydro phobic and oleo phobic film is in a relatively low surface energy material manufacturing suitable surface roughness. They coordinate each other and get oleo phobic and hydro phobic film. The primary preparation methods include some physical methods such as template method and soft lithography. And it includes some chemical methods such as phase separation method and chemical vapor deposition method. The primary preparation methods need the matrix material be low surface energy materials. And these films have defects such as low surface hardness, poor corrosion resistance, only a flat color and not bright. Chemical methods such as phase separation method often use chemical solution polymer. Most of them have flammable and explosive components such as alcohol. Discharge of waste solution will cause water and air pollution. Magnetron sputtering vacuum coating made the oleo phobic and hydro phobic film,there is low requirement of matrix material. Most metal material or organic materials can be used as base material. The most important is magnetron sputtering vacuum coating doesn’t waste gas, residue and water and it’s environmental protection. But now there aren’t many cases of magnetron sputtering vacuum coating. Because magnetron sputtering vacuum coating made the oleo phobic and hydro phobic film has poor performance. So, how to use Magnetron sputtering vacuum coating make upper the oleo phobic and hydro phobic film is a serious problem.Study deposition of Ti N compound thin film in 1Cr18Ni9 mirror stainless steel substrate. Using middle frequency unbalance response alternating current magnetron sputtering to get the oleo phobic and hydro phobic film best process and parameter. Study surface roughness and particle size of Ti N film effect of the oleo phobic and hydro phobic of the thin film.Study the sputtering time, nitrogen flow rate, sputtering target power and sputtering bias voltage effect the oleo phobic and hydro phobic film. Choose and adjust each parameter make orthogonal test and parallel test.Analyzed the orthogonal test and paralleled test results. It shows that Ti N compound thin film in mirror stainless steel substrate will be a small solid-liquid contact angle and low self-cleaning. Compound substrate in film surface preparation solid-liquid contact angle will increase while acceding to primary bombardment process. Finally make sure long time primary bombardment and short time deposit produce hydrophobic and oleo phobic film in mirror stainless steel substrate. The specific process is first plating on stainless steel mirror surface deposition layer of pure Ti transition layer by high pressure. It not only ensures film adhesion but also coarsens the surface of the base body and increase the contact area with air. And use magnetron sputtering vacuum coating deposit pure Ti transition layer on Ti N thin film. It solves the problem of solid-liquid contact angle short and self-cleaning bad in direct deposition Ti N thin films.The paper also studies the relationship between the oleo phobic and hydro phobic film properties and film surface microstructure. And get when the film surface microstructure is papillae and particle diameter in 80~100 nm thin the Ti N film the oleo phobic and hydro phobic film is best.In summary, this study investigated the deposition of Ti N compound thin film in mirror stainless steel substrate process and studies the sputtering time, sputtering power, nitrogen flow; primary bombardment time and other parameters affect the oleo phobic and hydro phobic of the thin film. And made the process of using magnetron sputtering to prepare Ti N thin film with the oleo phobic and hydro phobic feature. It study surface roughness of the film and microstructure of the film and the particle size of Ti N effect the oleo phobic and hydro phobic of the thin film. The result showed that in a certain period of time, prolong the primary bombardment time can rough the substrate surface and change surface roughness of the film. And it changed the microstructure of thin film. The oleo phobic and hydro phobic of the thin film increased with the increasing of the grain size of the thin film. When the film grain size is between 80~100 nm the oleo phobic and hydro phobic performance of Ti N film reaches best.