Multi-arc Ion Plating Preparation Tin/a1n Nano-multilayers And Its Performance,

Surface engineering, as a newly synthesis subject, has been progressed rapidly in recent yeas. It was proved that the application of surface engineering can excellently improve surface property of material, which can improve productibility and save resources. Experts prophetic that surface engineering will become one of the most predominant techniques in the future of 21 century.Multi-arc ion plating technique is using cool cathode with self-maintaining arc discharge as evaporation source. Because it's a nearly totally ion plating technique and with some other characteristics, it especially can be used to prepare metallic compound coatings or metal coatings with high melting point on metal surface, it has been onrushing developed since 1980's and become one of the most advanced technique at present.The main hard coating material for tools and dies is TiN. Preparation of TiN by kinds of techniques have been studied in-depth and used in protection of tools. However, TiN film tend to oxidize at temperature above 550℃ and easily become invalidate if being used in particular environment. It was find that adding other element like Gr, Al, Zr, C , Si and so on or multi-coatings such as TiN/Ti, TiN/VN, TiN/CrN could improve coating property. So most study on TiN based coatings basically were concentrated on these two directions. This study using multi-arc ion plating technique prepare TiN/AlN nano-multi layers based on TiN preparation. Furthermore properties of TiN/AlN nano-multi layers were also studied preliminarily.The first part of this paper is the study of preparation of TiN films using multi-arc ion plating. The four main influential factors such as deposition temperature, gas pressure, bias voltage, target power have been studied. The laws of these factors influent coating depth and properties have been found. Conclusions : deposition temperature at 500℃ (for high speed steel); gas pressure is 1Pa; target power choose as 80A; deposition time is 40min and bias voltage is 50V. TiN coatings have optimum composite properties.The second part of this paper is the study of preparation of TiN/AlN nano-multi coating using multi-arc ion plating. TiN/AlN nano-multi coatings with small period show higher hardness than TiN coatings but their coherent strengths at the same level. It was shows that TiN/AlN nano-multi coatings have better anti-oxidize and anti-corrosive properties than TiN films through oxidation and corrosion experiments.