Of Mems Technology Integrated Design And Visualization

Micro Electro-Mechanical System (MEMS) is a promising subject now, and it is expected to have a huge market in the future. Recently, MEMS was developed very fastly, and the MEMS devices were more and more complex. Compared with the development of manufacturing technologies for micro-device, the development of relevant CAD tools had not kept pace with the rise in sophistication of MEMS.To eliminate the tediousness and inefficiency in MEMS design, the integrated design and visualization of MEMS process was presented as a feasible solution. The key technology of the above-mentioned solution was discussed, and the solution was implemented.Firstly, MEMS fabrication processes were classified. The most popular and practical process, surface microfabrication was chosen as the object to be discussed, and MUMPS, a standard of the surface micromachining, was analyzed in detail. The 3D geometric model of MEMS device, the procedure model and the process model of surface micromachining were built, for the integrated design and visualization.Secondly, system structure, database support, information format of integrated design were discussed deeply. Information was integrated in the integrated environment which implemented by the database technology and interface-integrated method.Finally, the algorithm of 2D layout with process information to 3D solid model transition was discussed, including union, intersection and difference of geometric model. Based on the algorithm, the visualization of MEMS surface micromachining process was realized in the environment of SOLID WORKS.In conclusion, process integrated design made designers to use all information refered more conveniently; visualization of process made the process more intuitive and efficiently.