Improve The Ccd Relative Deflection Measurement System Accuracy Study

Charge coupled devices (CCD) are sensors which integrate the optics to electronics conversion, charge storage and charge transition. The advantages of CCD in measurement are high accuracy, low cost, easy maintenance and simple manipulation etc. as it has such features as self-scanning, high aspect ratio, high sensitivity, compact structure and accurate pitch position. Therefore, it meets the needs of high efficiency, automation, on-line measurement and non-contact detection, which make itself quite competitive in the measurement of small dimension. This paper discusses the structure and properties of measuring system for detecting relative deflection. In the term of the request, we provide the application design of the measure system. The method of self-adaptive signal comparison is used in this system for deducing the influence of background rays to the output of the CCDs. The system includes 8 CCD inputs, uses a cycle access way to switch channel and read the data from the output signal of the CCD, and communicates with PC through a COM port. The system consists of driving pulse generating circuit for CCD, instrumental amplifier with low noise, MCU controlling circuit and PC program for dealing with the data conveyed by MCU. The paper discusses the design of self-adaptive signal comparing circuit, driving pulse circuit, interface and the MCU software. In the end we give the result in experiments for reference.