Z-axis Micromachined Gyroscope Integrated Design Techniques

MEMS have the feature of miniature, low cost, strong reliability and the potential of high performance, which enable it to have wide use and have become an important branch of current inertial technology, especially for the aviation, aerospace.Micromachined gyroscope is one typical MEMS device. The Z-axis micromachined gyroscope becomes the development direction of the micromachined gyroscope with its high performance.A new structure of Z-axis micromachined gyroscope with mechanically decoupled through sixteen independent suspension beams is designed by means of the integration design method based on the design flow of system level, device level and process level.In system level design, some Multi-Port Element Network (MuPEN) models were developed, and the system model of Z-axis micromachined gyroscope was established with the small-signal frequency analysis and time-domain transient analysis. In device level design, the mode analysis and damping analysis of the Z-axis micromachined gyroscope was done. In process level design, the layout and process with geometrical simulation was made.At last, the Z-axis micromachined gyroscope was fabricated in a bulk micromachining process, the difference between design and fabrication has been analyzed.In addition, in order to support the design, some data transfer interfaces have been developed in the design fow.