Microcantilever Mechanical Performance Analysis And Graphical Simulation

Nano-science and technology, which began to thrive in the late 1980s, is experiencing an unprecedented development, with its future promising. It is a cross subject containing high technology. The scanning probe microscopy (SPM), represented by atomic force microscopy (AFM), is playing an important role in promoting the advance of Nano-science and technology. The main applying fields of SPM are as following: biology, micro-electronics, medicine, physics, material science and optics. To the researchers of Nano-science, AFM is becoming an indispensable observing and researching tool.Based on the systematic analysis of the technological property and application outlook of SPM system, this paper focuses on the mathematical simulation of the rule of atomic force, the mechanical performance of micro-cantilever which is the core of SPM system, the noise of the AFM system. Then we will exhibit the result in the way of two-dimension, three-dimension or four-dimension coordinate picture, in order to do intuitionistic analysis of their rules and properties, at the same time as a guidance of improving the system performance.This thesis includes:1. Analyzing the rule of the force between probe and sample, discussing the property of force when two atoms or molecules approach.2. Mathematically analyzing the rules of atomic force or molecular force, simulating them graphically, and then discussing the rule again.3. Analyzing the mechanical performance of the micro-cantilever, the correlative parameters of material-mechanics, the static property and the dynamic moving rules. Studying deeply the complicated relations among the parameters.4. Mathematically modeling and graphically simulating the research result, then probing into the mechanic performance of the micro-cantilever.5. Studying the resonance frequency and its vibration rule of the micro-cantilever when the system is working, analyzing them mathematically and finally simulating them graphically.6. Studying the noise and its excursion rule when the AFM system is working, giving the expression revealing the vibration trend by the mathematical means, at last , simulating the whole process.