The Application And Research Of Chemical Air Filters For The Micro-electronics Industry

In the microelectronics industry, the potential harmfulness of the airborne molecular contaminants(AMC) to the processing procedure has been paid more and more attention with the increased complexity of the product process and the products shrinking of the integrated circuits and driver disk. The chemical filters are the primary components which are used in the ventilation system of air conditioning in present microelectronics industry to control AMC.This thesis describes the classification, source, impact, control methods, and related industry standards of AMC in the microelectronics industry. We used a variety of methods instruments to assess the production environment of one manufacturer. The type and concentration of AMC which would affect the manufacturing technique are determined. Based on the adsorption principle and experience of the production, the adsorbent for different pollutants are prepared by using potassium hydroxide and copper sulphate solution to modify the chemical property of the activated carbon and the potassium permanganate solution to modify the chemical property of the alumina. We also finished the experiments of the adsorbent performance test and determined the optimal technique of sorbent preparation. We designed and manufactured the chemical filter of five specifications including three types, such as the flat type, V-type and cylindrical types. The conventional performance experiments of the chemical filters were completed to study the effect of the adsorbent layer thickness on the adsorption efficiency and compare the overall performance of the chemical filters for different structure.Moreover, we investigated the major effect of the chemical filters on the ventilation system of air conditioning and the measure to decrease the effect. The important performance parameters to select the chemical filters in the ventilation system of air conditioning were suggested. The actual effect of chemical filters is monitored. Finally, we give a summary for the investigation of the application for chemical filters in the microelectronics industry.