Research On Key Technologies Of Precision Two-dimensional Positioning Stage With High Stiffness&Large Load

In recent years, with the trend of advanced equipment manufacturing’sdeveloping is gradually towards ultra-precision, and the continuous improvementof aero-engine performanc, the precision of processing and assembly increasinglydemanding. Especially when pursuiting of higher thrust to weight ratio, theinfluence of engine vibration is gradually highlighted. So, there is higherrequirements for the positioning stage. We need the positioning stage with highstiffness, large load, high Precision and large travel. Therefore, this paper carriedout research on it, and improved the precision X-Y two-dimensional positioningstage which is restored by springs. The main contents are as follows:Firstly, conduct research on the structure and principle of the precision X-Ytwo-dimensional positional stage which is restored by springs, establish itsphysical model and finished the necessary analysis and calculation. By analysedits overall performance, we found that this stage had a lot shortcoming: lowstiffness, small load, displacement sensitivity is not the same in differentdirections etc, which affect its performance in using. So, it is nesessary to improvethis positioning stage. establish its physical model and finished the necessaryanalysis and calculation.Secondly, on the basis of analyzing the original positioning stage, deducedthe positioning stage’s structure design idea for improvement. Conduct research onthe improved positioning stage’s structure and principle. Analyses its overallperformance, and compare with the original positioning stage. Then summarycharacteristics and advantages of the improved positioning stage.Finally, experimental analysis has been taken on both two positioning stages,including their stiffness, stability and displacement sensitivity under the differentload. Experiments show that, Under508kgf load, displacement sensitivity of theimproved positioning stage can reach0.3μm. On the other side, displacementsensitivity of the precision X-Y two-dimensional positioning stage which isrestored by springs is1.5μm. Stiffness of the improved positioning stage is betterthan3.8×10~5N/m. On the other side, Stiffness of the precision X-Ytwo-dimensional positioning stage which is only2.1×10~3N/m. Its stiffnessimproved181times.In summary, the precision X-Y two-dimensional positioning stage thatdesigned by this paper meets the requirements of the subject.