Key Technology Research Of Macro/Micro Two-dimensional Displacement Stage Based On Pneumatically Driving

With the progress and the development of mathematics, computer science, automation, electronics and other modern technologies, precision machinery manufacturing technology has become an important support for advanced manufacturing technology. Precision displacement platform, as the core component of precision machinery manufacturing equipment, will directly affect the performance of precision mechanical products. With higher requirement of accuracy in micro field and large stroke in macro field, the technology combined with macro and micro dual-drive is an effective strategy to achieve a large-stroke and high-precision motion control.Based on the principle of thin-walled in elastic mechanics, the paper developed a micro drive platform based on pneumatically driven. On this basis, combined with the thought of macro and micro dual drive, the paper designed a macro/ micro two-dimensional displacement stage with large stroke and high accuracy. With finite element simulation and experimental methods, the paper analyzed the characteristics of the micro-drive and micro-drive platform. The main research contents and achievements are as follows:(1) The demand of the displacement stage with large stroke and high accuracy in modern precision machinery manufacturing was introduced in this paper, and their research status quo and development prospects were also described.(2) Based on pneumatically driving and the principle of thin-walled in elastic mechanics, a new symmetrical structure of two-dimensional micro-feed displacement stage was designed whose gearing had flexible hinges. Because of its symmetrical structure, stiffness in both directions is equal. Through formula, the equivalent stiffness expression of the designed micro displacement stage can be derived. The paper, combined with ABAQUS simulation software, analyzed the equivalent stiffness of micro drive displacement. The results verified that the equivalent stiffness was correct.(3) The performance characteristics of micro drive and micro drive platform were analyzed with the help of ABAQUS simulation software. The paper also analyzed the pressure-displacement characteristics and the coupling displacement, and the results show that the designed micro driver and micro-drive platform have excellent linearity, and low coupling displacement. Therefore, the designed micro-drive platform is good enough to be a precision micro-feed mechanism.(4) The machining precision of the various components of macro/micro moving platform were determined, processed and assembled. Through analysis and comparison, appropriate test equipment was selected. The displacement linearity, repetitive output accuracy, resolution, and other characteristics of micro drive and micro drive platform have been experimentally analyzed respectively. Experimental results show that micro drive and micro-drive platform have excellent linearity of displacement. The macro/micro platform is developed, which has range of 13 mm, repetitive output accuracy of 0.25?m, resolution of 0.269?m, rigidity of 15N/?m. The correctness of the simulation theory is verified by analyzing and comparing pressure-displacement theory, simulation and fitting curve, which data are consistent.