Design Of Mounted Head Based On Ironless Permanent Magnet Synchronous Linear Motor

With high-speed development of microelectronics technology, the correspondingmicroelectronics manufacturing technology was also rising. The existing domesticplacement machines were used in the traditional mechanical structure. But manydrawbacks made it difficult to adapt to the current manufacturing technologyrequirements, such as, slow, low positioning precision, maintenance inconvenienceetc. Ironless Permanent Magnet Synchronous Linear Motor with high-speed, highacceleration and high positioning precision was ideally suited for improving machineperformance. This paper discusses the characteristics, the designing methodology, thestructures, the processes and the control strategy of Ironless Permanent MagnetSynchronous Linear Motor. Then designed the mount head based on CorelessPermanent Magnet Synchronous Linear Motor and analyzed the dynamicperformance of the mount head. The main work is as follows:1. Used a magnetic field analysis method based on fourier transform to analyzemagnetic field distribution of Ironless Permanent Magnet Synchronous Linear Motorand HALBACH magnet arrays. Than calculated the electromagnetic force of IronlessPermanent Magnet Synchronous Linear Motor and the influence of variousparameters on the electromagnetic force on MATLAB were analyzed to optimize themotor.2. Set up the finite element simulate model by ANSOFT and explained theadvantages of HALBACH magnet arrays by comparing the magnetic field distributionbetween ordinary magnet arrays and HALBACH magnet arrays. Then addedincentives to the simulation model by building driver circuit of ANSOFT CIRCUITEDITOR. Finally, analyzed electromagnetic force, current, etc. these simulationresults verify the above numerical results.3. Designed the structures of the mount head and the x-axis. And introduced themanufacturing process of HALBACH magnet arrays, designed the winding and thewinding skeleton, the pneumatic pickup system, the rotation correction system, Studied on two sensor detection methods, Finally, the paper analyzed the motioncharacteristics of the mount head by MATLAB.4. Researched the Space Vector Control method of Ironless Permanent MagnetSynchronous Linear Motor and carried the dq axis decoupling by the coordinate axistransformation. We got the tricyclic closed-loop system of current, speed and positionbased on field-oriented control by MATLAB Simulink blocks. Than obtained controlgraphs and further validate the above analysis results.5. Made the prototypes and built the experimental platform, measured theelectromagnetic force, and measured the current and the other data by the virtualoscilloscope, Compared two sensor control methods to collect the displacement databy Linear Variable Differential Transformer. Finally verified the above results.