Structural Optimization And Signal Detection Of MEMS Gyroscope Used In Rotating Bombs

Because of the current conventional MEMS gyroscope can’t meet the requirements of measuring the attitude of high spin bombs, the research group developed a micro-machine gyro, which can be used to measure the angular rate of rotating shells. The gyro can be drove by rotation of itself, simultaneously when pitch angle or yaw rate is existed, the mass can be oscillated under the action of the coriolis force, and it results the capacitance changes between the mass and electrode. Then by detecting the amount of capacitance change o achieve measurement of the angular rate. By tested the gyro of original design found it has some defects, such as poor overload, low level signal. So this paper researches to optimize the structure and detection circuitry of the gyro, and understand its performance through test. The main research contents of this article are as follows:(a) The basic principle of the gyroscope and the output characteristics were analyzed. First, to analyze the basic principles of gyro, then build the kinetic equations to analyze its output characteristics.(b) to achieve the optimal design of gyroscope structure, based on the principle of gyroscope and its output characteristics, to achieve the structure optimization. First, to determine the optimization direction and the structure selection. Then to analyze mechanical parameters related to the design process, and the influence of structural parameters to the output of gyroscope to determine the structure type and size, then to simulate depended on the software of ANSYS. Last the electrical properties of the gyro are analyzed to verify the feasibility of the optimization.(c) Gyro structure process and layout are designed, according to the structural design of the corresponding gyro process, to achieve the gyro processing. First, analysis of the MEMS technology used in the manufacture micromechanical gyroscope currently. Then design the processes and corresponding processing layout according to the gyro structure and process. (d) Gyro detection circuit optimization and performance test. First introduced the interface circuit, to understand the optimize direction. Then, based on the testing and optimization of circuit analysis to optimize the gyro detection circuit. Finally, based on the optimized detection circuit to test the performance of the gyroscope.It can be obtained through the test, when driving angular speed is500r/min, the optimized gyro sensitivity is4.33mv/°/s, non-linearity is0.11%, and the resolution can reach0.1°/s; when driving angular speed is1000r/min, optimized gyro sensitivity is6.69mv/°/s, non-linearity is0.11%, and the resolution can reach0.1°/s...