Research On Driving And Controlling System Of Linear Ultrasonic Motor Based On SOPC

The subject comes from the National Basic Research Program (973program)(Fund number:2011CB707602) and the National Natural Science Foundation (Fund number:51275229).Because of using the converse piezoelectric effect of piezoelectric ceramic materials to work,linear ultrasonic motor does not need to transform organizations to produce linear motion. It has theadvantages of simple structure, fast response speed, high resolution power, self-locking and noelectromagnetic interference, etc.In this thesis, a new type of drive control system is designed for the double amplitude V linearultrasonic motor which is the research object. The system can control the precision of electric motorto achieve nanoscale movement.Take the FPGA (model: EP3C40Q240C8) producing by Altera corporation as the core of drivecontrol system and use the SOPC technology based on soft core Nios II to integrate the processor,system peripherals, DDS signal producing module, counting module and grating feedback PIDcontroller module in the FPGA, which significantly reducing the volμme of the drive control systemand the power consμmption of the system, facilitating the late changes system upgrade, and going tobe commonly used.Experiments were carried out studying on the precision motion platform of Linear ultrasonicmotor after the design of the driving controller was finished. First, test the minimμm interval of themotion platform, analyzes the characteristics of the speed of the motor under different driving signal,and study the stability of the motor using the PID algorithm. Second, use continuous motion andstepping into the approach together to improve the positioning precision of the platform. Last but notthe least, control the precision platform of multidimensional linear ultrasonic motor to complete theexperiments such like cell piercing. The experimental results show that the drive control system cancontrol multiple motors at the same time to complete their direction on precision motion; theminimμm interval is lower than50nm; the positioning accuracy is0.36μm. Under the control of thissystem, multidimensional motor platform can be used as the cell handler in biological engineering,etc.