Study On The Intellectualization Of Capacitance-type Micrometry System

For purposes to enhance measuring accuracy, dynamic characteristics, operation convenience, ability of data processing and data analyzing, study is made for the intellectualization of the capacitance-type micrometry system. The system consists of a capacitance-type micrometer which is at the core of the system, the single-chip microprocessor system and the epigyny PC virtual instrument. The main study content includes following aspects.1) Analysis of the composing units and the working principle of the capacitancetype micrometer systematically.2) Analysis of the dynamic characteristics of the composing units of the capacitancetype micrometer is done. Especially, the dynamic characteristic of the demodulation filter which has a distinct effect on the whole instrument is analyzed theoretically and optimized. After optimization, the dynamic range and frequency selectivity of the filter have been enheanced.3) Design for the hardware and software of the single-chip microprocessor system is done. The system is used to carry out measurement control, data acquisition, data storage, wireless communication with epigyny PC. Hardware design includes selection of main chips and system extension. Software design includes a main program design and several functional sub-program design.4) Under the developing bench Lab VIEW, VI of epigyny PC of the capacitance-type micrometry system is developed. It is mainly used to receive measuring data coming from the single-chip microprocessor system, and then to do data processing and data analyzing. In the process of calibration data processing and measuring data processing, a concept of “compensation function” is submitted. The principle and method to carry out scale transformation and non- linaerity error compensation. Using compensation function is introduced.