The Mechanical Structure Design Of Stretching And Clamping Alignment System For Micro Component

With the rapid development of micro/nano technology, the mechanical properties of micro components have an important influence on the structure design of MEMS. The macroscopic mechanical property testing system of traditional structural materials can’t be applied to the measurement of micro component material properties, so it is necessary to develop a system which can be applied to the measurement of the mechanical properties of micro component materials. The paper, which is based on the measurement of micro components mechanical properties using the tensile loading method, focuses on the clamping centering guiding method of micro component, the clamping mechanism for tiny test pieces and the design of loading structure unit of force and displacement. It lays a good foundation for the integration of the subsequent measurement system.The main research work of this paper includes:1. Aiming at the measurement parameters for the mechanical property index of micro components, the modules of the test system of the tensile test system are divided and the selection of the relevant experimental equipment is carried out.2. In order to meet the centering requirements of the testing pieces, the centering adjustment system of clamping heads based on laser collimation is designed. The micro angle and displacement of the centering adjustment are verified after constructing the experiment platform.3. The clamping mechanism based on the flexible hinge which includes dynamic and static clamping head is designed. The static clamping head accomplishes clamping and load measurement while the dynamic head fulfills clamping, stretching and displacement measurement.4. The micro displacement loading mechanism with the stretching function which is based on the flexible hinge is designed. The loading mechanism is able to load force and displacement on the test pieces at the same time. The corresponding mechanical simulation of the designed structure is carried out by ANS YS and the simulation results show that the designed loading mechanism is able to achieve the functional requirements.