The Dynamic Characteristics Analysis And Experimental Study For Wire Saw Machine Tool

The wire saw and feed system are the two most important parts of the wire saw machine tool. As the tool of wire saw machine tool, wire saw’s dynamic characteristics will directly affect the surface roughness and surface defects of wafer; feed system’s dynamic characteristics will directly affect the quality and efficiency of machine tool; therefore, the dynamic characteristics of wire saw and feed system are studied by means of theoretical modeling, finite element analysis and experiments, which includes the following main contents:The finite element analysis (FEA) model of the wire saw was established and the natural frequencies under different tensions were analyzed. The results of modal test showed that the errors of first three order natural frequencies were less than 5%, and the verification of the finite element model was done. Based on the free modal model, the analysis and experimental verification of the operating modal were then finished, which indicated that the first order modal frequency became bigger with the wire tension increasing and with cutting parameters constant.Based on 2-DOF theory, the dynamic equation of the feed system of wire sawing machine tool was established. The empirical formula method was used for obtaining the axial stiffness of the screw, and the equivalent stiffness of the joint surface between the bearing and the lead screw, and the joint surface between the lead screw and the nut in the axial direction, and that of the joint surface between guide rail and slide in the radial direction. The first four natural frequencies of the feed system can be solved by putting the equivalent stiffness into the dynamic equation of feed system, which lays the analysis foundation for the parametric modeling and variable dynamic characteristics of the feeding system. The FEA models of the feed system with the joint surface and without the joint surface were built, and the corresponding modal analysis and harmonic response analysis were completed. The modal experiment of the feed system showed that the finite element model of the feed system with the joint surface was more accurate, therefore, it is necessary to study the joint surface characteristics involved in the wire saw machine tool. At last, in order to improve the finite element model of the feed system of wire sawing machine tool and realize the dynamic characteristics of the whole system, an experimental platform for the study on the joint surface characteristics was designed, and the strength check was carried out to verify the rationality of the design of the experimental platform.