Design And Analysis Of The Physical Vapor Deposition Coating Machine Key Part

This paper introduces the key components of physical vapor deposition(PVD)vacuum coating equipment,Including the design and calculation of key components,the choice of design parameters and the impact of magnetic field on the process.The key points include the following aspects:The design and calculation of the vacuum chamber are carried out;the modal analysis and static analysis of the vacuum chamber are carried out;design and model the planetary rotating disk;design the magnetron sputtering target and analyze its magnetic field;the arc target is designed and the magnetic field is analyzed;design ion source and analyze magnetic field.In order to verify the practicability of the modular design method,about coating in low temperature using physical vapor deposition(PVD)vacuum coating equipment.In the light of theoretical analysis and production practice,the relevant performance parameters of coating are obtained.At the same time,production equipment was manufactured in accordance with the design and production tests were carried out.The main contents of this paper are as follows:The modal analysis and static analysis of the vacuum chamber,which can provide reference for the design of vacuum chamber.Analyze and design the transmission and drive motors of planetary workpieces;also analyze the rotation and bias conditions.Design of magnetron sputtering target structure,and analyze the magnetic field;design the structure of the arc target and the finite element method is used to analyze the magnetic field;each conducted a production test.Design the structure of the ion source and use the finite element method to analyze the magnetic field;carry out the production test.After completing the design of physical vapor deposition(PVD)vacuum coating equipment,make a prototype,and carry out a coating processing test.The results show that the use of software design is very effective.Simulation and design of PVD coating equipment can reduce the manufacturing cost,predict the quality of coating process and shorten the production and development cycle.In the PVD coating equipment manufacturing,the design of key components break the international technology monopoly.It is reality that PVD coating equipment made in China,and fill the domestic blank in the PVD coating equipment manufacturing.