Hybrid Ceramic Ball Bearing Thermal Analysis Of High Speed Small Composite Molecular Pump

High speed and small compound molecular pump is the key component of many analytical testing instruments, and it is an important way to solve the clean high vacuum environment of scientific instruments. Rolling bearing which used in high speed small compound molecular pump is hybrid ceramic ball bearing. Bearing due to the friction torque will produce heat, if the heat can not be distributed in time, it will be easy to make the bearing failure, so that the molecular pump can not work properly. Therefore, it is significant to study the thermal analysis of bearing.The paper takes a hybrid ceramic ball bearing which used in high speed small compound molecular pump as the research object, mainly to complete the work in the following four aspects:(1) Based on the elastic contact theory, with Hertz theory to calculate the bearing contact force and contact deformation. And use the finite element analysis software ANSYS Workbench to calculate the bearing contact force and contact deformation. Then compare and analyze the results.(2) Select appropriate bearing calorific value calculation model, calculate the calorific value of the bearing, and use the finite element software ANSYS Workbench to simulate the temperature field of the bearing, and obtain the steady-state temperature field distribution of the bearing.(3) Using the finite element analysis software ANSYS Workbench to complete the simulation analysis of the thermal structure coupling of the bearing.(4) Designed and installed the temperature sensor on the small type high speed deep groove ball bearing fatigue testing machine, real time monitoring of the temperature in the working process of the bearing and obtain the temperature of the bearing working condition. The measured temperature data of the bearing is compared with the Workbench ANSYS temperature field simulation, the result is consistent.