Research On MEMS Digital Accelerometer Test System

The research of MEMS digital accelerometer mainly includes analog MEMS accelerometer,digitization of acceleration signal and digital accelerometer test.The digital accelerometer test system is used to analyze various parameters of the acceleration signal,and it penetrates the R&D and production links in the research and development,trial production and finished product testing of the MEMS digital accelerometer.To meet the requirements of MEMS accelerometer digitization technology,this paper studies the intensive,intelligent and real-time MEMS digital accelerometer test technology,and combines the complexity of the new MEMS accelerometer to study the test system technology and acceleration signal analysis algorithm.To meet the testing requirements throughout the entire process in the development of MEMS digital accelerometers.MEMS digital accelerometer test system is mainly composed of upper computer,embedded test hardware platform and software algorithm.Among them,the upper computer realizes functions such as model data generation,test data analysis,data storage,and data display.The embedded test hardware platform implements functions such as communication,parameter configuration,data display and storage.The software algorithm part realizes the digital signal processing algorithm,display storage and self-check of the entire MEMS digital accelerometer test system.The research work of the thesis mainly includes the simulation of three-axis digital accelerometer signal generation,digital signal processing algorithm design,software and hardware development,and system debugging.Firstly,a digital acceleration error data model is established.Based on the error model of the digital accelerometer,there are three methods for statically testing the digital accelerometer to calculate and analyze the performance parameters of the MEMS digital accelerometer,namely the static six-position method and the static ellipsoid fitting method.Static matrix method.Simulated three-axis digital acceleration signals were used for software simulation.Through the analysis of the experimental conditions and software simulation results of the three methods,test methods suitable for the lower computer and the upper computer were obtained respectively.The test board communicates with the digital accelerometer through the IIC communication protocol.In this process,in order to ensure the accuracy of the received data,the hardware IIC communication self-test needs to be completed,and the data is received,displayed and stored in real time.To ensure that the entire system can work properly,first of all need to carry out functional self-test on each module of the test board,including data storage function self-test and self-test with the host computer through the serial port communication.In addition,an algorithm program is written by the upper computer to separate,real-time display,store and calculate the received three-axis digital acceleration data and analyze the performance indicators of the MEMS digital accelerometer:Include zero bias and scale factors,and display and store them in real time.In order to ensure the accuracy of the detected digital accelerometer performance indicators,the system software and hardware debugging needs to be completed.This process is verified by the algorithm simulating the three-axis digital accelerometer signals.In the process of joint debugging of the system,the MPU6050 module is used as a digital accelerometer module for testing.The module supports IIC communication,and the triaxial digital acceleration data in the register of the module is read through the IIC communication bus.The test board and the host computer pair The read three-axis digital acceleration data is stored,displayed,and analyzed.Compare and analyze the results.After completing the overall software and hardware debugging,an embedded system is established for final packaging.The dissertation involved microelectronics technology,MEMS technology,digital signal processing technology,embedded technology,communication technology and computer testing.