| A silicon-based MEMS setback arming device is proposed to meet the safety requirements of the optical logic control system of laser initiation fuze.The setback arming device is mainly composed of spring mass system,gear brake mechanism and locking mechanism.It has the characteristics of large displacement,identifying load amplitude and pulse width,and anti-overload.This paper mainly studies the mechanism of each module through theoretical analysis combined with numerical simulation,and optimizes the design of related structural parameters.According to the application environment of the setback arming device,the design requirements are clarified and the overall design scheme is put forward.The friction and collision between the side wall tooth structure of the recoil slider supported by spring and the tooth structure on the base plate are used to realize the delay effect,which ensures the safety of service handling and the reliable arming under certain recoil acceleration.The spring mass system is designed.The stiffness formula of the plane spring is derived by the "Mohr method".The displacement response formula of the spring mass system is derived by means of the unit impulse response function.And the correctness of the theory is verified by finite element simulation.The natural frequency range of the spring mass system is determined based on the applied environment.The finite element simulation was used to study the influence of the tooth structure parameters on the displacement response characteristics of the setback arming device in service and launch environment.When the setback arming device arming,the locking mechanism locks it.Dynamics simulation results show that under the launching load with a pulse width of 1 ms and more than 5000 g,the setback arming device can reliably arming.Under the service drop load with a pulse width of 200?s and less than 15000 g,the setback arming device can ensure the safety in handling transportation and storage.Combined with the simulation results and the silicon processing technology,the setback arming device is improved and the improved setback arming device meets the functional design requirements.The setback arming device is manufactured by using the silicon processing technology of MEMS.The overall size of the prototype is not more than 6mm × 5mm × 2mm,which meets the requirements of miniaturization design of fuze.Machining error analysis and processing defect form analysis are carried out on the prototype.Combining error data and defect causes,error compensation measures and structural improvement suggestions are put forward for later mechanism design. |