| In view of the development trend of miniaturization,intellectualization and integration of modern fuze,according to the application environment of medium and large caliber grenade,the safety system of fuze MEMS is studied.For the safe and arming device in the safety system,the structural design,performance verification and dynamic characteristics of the safe and arming device in the MEMS are studied by combining finite element simulation and prototype experiment.The basic requirements of safety system and fuze environmental force are analyzed.The overall design scheme and working principle of the safety system are explained.The performance indexes of environment identification,volume and anti-high overload of the safety system are determined.Multi-layer UV-LIGA technology and nickel metal material are used in the safe and arming device of the MEMS.The safe and arming device is separated into the base plate frame,micro-spring,recoil insurance mechanism,centrifugal insurance mechanism and flameproof slider.The safety mechanism is formed by micro-assembly.The key structural dimensions of the prototype of MEMS insurance mechanism processed in the same batch were measured and compared with the design values,and the process errors of each insurance element were determined.Combining with the exposure,development,electroforming and corrosion stages in the UV-LIGA process,the mechanism of error generation is analyzed,and the methods of reducing the manufacturing process error of the prototype are summarized.The feasibility and functionality of the whole safe and arming device and its functional components were tested,and centrifugal test and impact test platform were built.By combining the prototype test with the finite element simulation,the test environment is transformed into simulated load and introduced into the finite element simulation.The simulation test results are compared with the simulation results,which verifies the functionality of the components of the safe and arming device and the overall anti-high impact performance.A high-speed optical test platform was built,and the visualization test of the transient motion of the MEMS locking mechanism in impact environment,high frame rate and aperiodic was realized by using backlighting illumination method.By recording the instantaneous motion of micro-size,the function of the locking mechanism is verified,and the change process of Lshaped locking beam during the collision of the locking mechanism is verified.According to the research work of the safe and arming device of the MEMS,the improvement scheme of the recoil insurance mechanism and the locking mechanism is put forward.To overcome the shortcomings of complex operation,easy to cause structural deformation and low yield in micro-assembly process,a hybrid process based on UV-LIGA and precision machining was proposed. |
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