Study On A Hybrid Integrated Micro Fiber Spectrometer

As one of the typical MOEMS,the micro-spectrometer has many advantages compared with traditional spectrometers. It can be used in many areas. For these reasons,research on the spectrometer has become one of the research focuses worldwide.With the support of the Chinese National Nature Science Fund,based on the previous research work on the refraction-diffraction hybrid integrated micro spectrometer,the basic theories have been further studied. The final goal of this study is to fabricate a reflection hybrid integrated micro fiber spectrometer with a performance approximate the practical use. The primary coverage is listed as following.In this paper,the difficulties in the fabrication of such device have been analyzed.The influence of the detecting array on the spectrum signal is studied. A solution is put forward to correct the displacement error caused by width of the light activated element,when the sampling theorem is satisfied.To optimize the optical structure of the micro spectrometer,ray tracing computer program is developed to simulate the dispersing and imaging procedure of the micro spectrometer. The application of wavelet transform in the spectrum signal processing is studied. The influence of the transform on the Gauss spectrum peak is analyzed. A method is proposed to reduce the noise and background in the spectrum signal obtained by the micro spectrometer.On the base of the characters of the noise and spectrum signal,a signal acquiring and processing program is developed.A micro spectrometer is fabricated and experiments are carried out to test the performance of this device. In experiments,the light source is Hg lamp. Optical fibers with different radius and numerical aperture are used as the input units. The results show a fine linearity. The spectrum resolution is about 13.8nm,when a multimode fiber is used. A resolution of 5.7nm is archived,when a single mode fiber is used. The pixel resolution is about 0.66nm.