Research On Scanning Distortion And Mounting Error Of Optical System Of Laser Trimming Machine

Abstract: Laser trimming machine is an application of the laser trimming technique in electronic processing industry. It is a high technique equipment that utilizes interdisciplinary technologies such as optics, fine mechanics, computer control and fine measurement. It is mainly applied to the micro-trimming of thick-&thin-film.In this paper, A pre-objective dual-galvanometer-based laser trimming system, and its trimming principle and characteristic are described. With establishing the mathematics model of dual-gavanometer scanning system of laser trimming system, the function relation between the arbitrary point's coordinate in scanning region and galvanometer's deflected angle is deduced. Then, the distortions caused by using simple function to control galvanometers instead of the ideal function are analysed. Finally, A method that use the equivalent function to control galvanometers is proposed. In this method, can realize the high accuracy, speed, efficiency.Besides, the mounting errors of the optical system of laser trimming system are analysised by establishing mathematics model. The mounting errors mainly include two sides. One is the inclination of input laser beam and the axis of optic system, the other is the disorthogonality of the second galvanometer and f-theta lens. At last, a method of revovlation galvnometers in a degree is proposed to compensated mounting errors. Mouting error compensation has very hign application to improve the performance of laser trimming system.