Research And Application Of MES In Semiconductor Industry

Today, under a drastically competitive market environment, Enterprises have to make their corporation more powerful if they want to hold more market segment share. For having the characteristic of high techniques, stringent manufacturing process, costly raw materials, short production cycle time and fast information exchange, the semiconductor industry is naturally not excluded out of this law. Semiconductor manufacturing is among the most complex production problems encountered today.Thus, it is very important for semiconductor manufacture to have a MES which is suitable for changing business, scalable, high availability. However, in terms of special industry feather of semiconductor, how to choose and better integrate MES system to enhance company competence is more and more taken into enterprise consideration.In this paper, we firstly analysis the history and developing status of MES technology and provide the MES conception and functional model.After that we have an overview of semiconductor industry background, semiconductor technology and development trend. We point out that no one MES can adapt to all manufacturing industry because every field has its own process character.It is significant for semiconductor manufacturer to implement MES in their company.The discussion of semiconductor MES's system architecture, function realization, implementation procedure and application fruit is the emphases of this article. By analyzing the problems our company was facing before, and translating the shopfloor requirements into MES customization usage based on the supplier's MES platform, we show the ways and means of enterprises to import MES, and the great achivements after MES is applied since semiconductor manufacturing is in such a good developing environment at our motherland.The study and most creative meaning go as follows:1. The study discusses the developing course and funcational models of MES in manufacturing industry and analyzes the application status and funcation components of MES applied in semiconductor fabrication.By making use of the MES experiences in our company, we list out the new requirements to be settled in semiconductor field.2. The paper illustrates the key developing techniques, shopfloor objects modeling methods, and process working models of MES in our company. Meanwhile, we put forward some new concepts in MES such as CCPM (Control Chart Preventive Maintenance).By showing the implement proceudure of MES, we embody the general steps of importing MES. All this is expected to be somewhat valuable for the similar corporation to use MES system.