Study Of Virtual Prototyping Technology Platform Of The Magnetic Levitation Precision Mechatronics

In this paper, the development trend of micro-electronics equipment, the progress situation of precision work stage for laser photolithography equipment and the research and evolution of magnetic levitation technology in China and other countries are discussed generally,the magnetic levitation technology and the work principle of linear motor are stated,the virtual prototype machine technology is introduced in detail, and the virtual prototype machine method is researched, Moreover, practical significance of research on new magnetic levitation precision positioning stage with virtual prototype machine method is illuminated. Combining magnetic levitation technology and linear motor drive technology, applying CAD/CAE method, a new magnetic levitation precise stage is designed and researched, which is a step and precise position mechanism in IC chip manufacture equipment of micro-electronics trade such as laser photolithography equipment. It is an innovative research. Applying magnetic levitation technology, the stage is suspended on the trail of inverse "F", thus the wear and tear is eliminated, linear motor non-contact drive realizes precise position of stage. Applying virtual prototype machine technology, by means of CAD/CAM/CAE software (Ugnx2.0), the 3D model of principle prototype machine of magnetic levitation position stage is designed conceptually, the mechanism simulation and interferential checks were done. And the structure is rational. Applying the technology of associated simulation with ADAMS/Controls module and MATLAB, the mechanical system and the control system of magnetic levitation precise stage principle prototype machine are associated designed and debugged, and mechatronics simulation is carried, and then the best project is gained, The principle prototype machine of magnetic levitation position stage is produced, and on different station the positioning tests are carried out. Then the different result show that positioning precision on magnetic levitation station is higher than frictional station and the magnetic levitation structure can improve the positioning precision. And on this station the positioning precision of principle prototype machine can come to 0.1mm. Comparing test data with the ideal data of virtual prototype machine, the superiority and validity of virtual prototype machine technology and the rationality magnetic levitation position stage are obvious, Furthermore, this research provides a new method for the design of Mechatronics product.