The Interaction Mechanism Of The Nion Beam And PET Surface And With Influence Of The Performance Of SiN_x/PET

PET substrate is widely used in many fields, such as chemical, electronics, optics, energy, biological materials, medical materials and so on, because of high strength, strong transparency, good flexibility, easy processing and low prices. But PET substrate has some disadvantages, such as low surface energy, chemically inert and weak boundary layer, which results in the PET substrate surface shows the inert and hydrophobic. And, as the substrate for photoelectric devices, the PET can not adhere well with the other functional films, which result in the device easy to aging. Therefore the surface modification of PET material has important significance.In this paper, the low energy ion beam was used to modify the surface of PET. The working pressure and power of N ion beam have been systematically studied, which could effect on the PET chemical composition, the surface chemical bond structure, static water contact angle, and the adhesion properties SiNx/PET and SiOxNy/PET. The main results are listed as the followings:1. For N ion beam working pressure increased from0.1to0.9Pa, with the other conditions constant, it was found that the relative content of C-O bond on PET surface constantly reduced. On the contrary, the relative content of C-N bond increased. At the same time, the static contact angle of PET surface to water was increased to130°, which meant that the PET surface becomes hydrophobic.2. For N ion beam working power increased from0to250W, with the other conditions constant, it was found that the relative content of C-O bond on PET surface constantly reduced. On the contrary, the relative content of C-N bond increased. At the same time, the static contact angle of PET surface to water was increased to95°, which meant that the PET surface becomes hydrophobic.3. For the SiNx/PET complex, the homemade bending fatigue test was carried out for all samples, which SiNx film was deposited onto the PET surface treated by the N-ion beam with different power. It was found that before and after the bending fatigue test, the surface of SiNx/PET complex has little change of static contact angle, which the PET surface was treated with150W in working power. This meant that the SiNx films adhered well onto PET surface.4. The author studied the changes in the SiOxNy film growth in the early stages of the the different power N ion beam treatment of the PET surface, and the changes of the interfacial layer. We found that the the SiOxNy film growth in the working power of150W N ion beam treatment of the PET surface, when the the interface layer with dense layer structurethe was formed in the interface.